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Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

Author(s): Khadim Daffe, Gilles Dambrine, S. Arscott, B. Grandidier, S. Eliet, C. Boyaval, T. Xu, A. E. Fellahi, J. Marzouk and Kamel Haddadi
Year: 2017
Month: October
Conference name: 2017 47th European Microwave Conference (EuMC)
DOI: 10.23919/EuMC.2017.8230973

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